Vapor Prime + Image Reversal Equipment

YES-310TA & YES-58TA

Overview
YES-310TA Specs
YES-58TA Specs
Stainless Steel Process Cassettes (accessories)

YES-310TA and YES-58TA vacuum bake systems have dual function capabilities, incorporating vapor prime + image reversal so you get the ultimate “one stop” environment for your process. (For single function systems that perform only image reversal, see the YES-8TA and 10TA).

Image Reversal

This process reverses the action of positive resist so negative images can be formed with the same resolution and processing ease of positive resist. Additionally, image reversal allows variations of the slope of the photoresist sidewall for higher resolution and improved lift off profiles.

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