Cure/Bake/Anneal

Applications:

BCB Cure

Benzocyclobutene (BCB) is used to create photosensitive polymers, which require fewer processing steps than dry etch materials.

• BCB Cure

 

 

Copper Anneal

Annealing is a heat treatment where the microstructure of a material is altered, causing changes in its properties such as strength and hardness.

• Copper Anneal

 

 

Low-k Dielectric

Complete dehydration of porous low-K material poses a major challenge to process engineers.

• Low-k Dielectric

 

 

Polyimide Cure

Polyimides are high temperature engineering polymers utilized by semiconductor manufacturers for their excellent mechanical, thermal, and electrical properties.

• Image Reversal

 

 

Dehydration Bake

Vacuum bake at high temperature to ensure elimination of surface moisture.

• Dehydration Bake

 

 

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