For MEMS device packaging, a hydrophobic coating reduces stiction, the undesired static friction that wears down devices. Minimizing this stiction goes a long way towards increasing device reliability and longevity as well as preventing damaging lock-up, which occurs when the device flexes and sticks to itself.

The YES vapor phase deposition systems are ideally suited for surface coating of MEMS devices.

Request a Quote button

News & Updates

Other Updates