Benzocyclobutene (BCB) is used to create photosensitive polymers, which require fewer processing steps than dry etch materials. BCB-based polymer dielectrics may be spun on or applied to a variety of substrates for use in MicroElectro-Mechanical Systems (MEMS) and microelectronics processing.

Typical applications:

  • Adhesive wafer bonding
  • Low-K dielectrics
  • CMOS
  • Bipolar devices
  • Optical interconnects
  • Intracortical neural implants

BCB’s primary advantage over other polymers is its compatibility with conventional integrated circuit (IC) processing techniques as well as with various metallization systems. BCB also has a low-K dielectric, a low dissipation factor at high frequencies, low moisture absorption, and a high degree of planarization.

YES-450PB ovens and the fully automated YES-VertaCure are ideally suited for this process.

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  • February 11-13, 2020 - Visit YES at booth #904 at Medical Design & Manufacturing (MD&M) West, Anaheim, CA
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  • July 21-23, 2020 - Visit YES at Booth #5969 at SEMICON West 2020, in San Francisco, CA

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Located in Livermore, California, Yield Engineering Systems (YES) is a privately held company that manufactures engineering process control equipment to meet the needs of innovative engineers and lab managers.

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