Sunday, November 23, 2014
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SECS/GEM

SEMI E5-0308 and SEMI E30-0307 compatible host communications and remote tool control are available as an option for YES-PB series vacuum ovens. The SECS/GEM host communications option offers the following capabilities:

  • Establish communications
  • Remote or local tool control
  • Status variable reporting
  • Equipment constant reporting and modification
  • Date & time
  • Loop Back Diagnostic
  • Status variable limit monitoring
  • In-process materials status
  • Alarm reporting
  • Alarm report enable/disable
  • Simultaneous trace reports
  • Event report definition and linking
  • Event report enable/disable
  • Process program selection
  • Process program upload/download
  • Process program verification    
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