Pre-Owned
Yield Engineering Systems is now offering pre-owned and factory reconditioned YES tools!
Call 925-373-8353 or contact us for more details.
One (1) tool is currently for sale:
- YES-1224 (Vapor Deposition System) Demo tool {$125,000 - Domestic}
YES-1224 (Vapor Deposition System):
Chemical Delivery Assembly
- Two (2) chemical capacity. Withdraw directly from source bottles (chemical supplier's bottle)
- Ventilated cabinet with secondary containment
- Source material is kept at ambient temperature
- Source bottle cap and plumbing are N2 purged
- Two (2) micro pumps to allow precise metering of fluids
- Polyimide vacuum/vapor valve seals for increased process tempeartures, chemical resistance and less maintenance
- Two (2) independent vaporization micro flasks with independent chemical inlets
- Two (2) independent temperature controls for vapor deliviery line
- All source plumbing is PFA
Oven Assembly
- 316L Electro-polished stainless steel chamber
- Heated door with special design for heater coverage and insulation to improve uniformity and prevent condensation. Design will lower thermal transfer into the clean room
- Four (4) process trays can be configured in multiple positions to allow for different size substrates
- Four (4) independent temperature control zones for the process chamber to ensure uniformity
- Two (2) chemical vapor delivery (or water vapor) inlets, 3 plasma gas inputs, one additional process gas input
- Gas plumbing located on rear of chamber for ease of maintenance
- Preheated Nitrogen rapidly brings product to operational temperature
- System for accurate process pressure tracking through all vacuum ranges
- Rear-mounted, heated vacuum valve for ease of maintenance (prevents condensation at the valve). Independent controller can be set at any temperature between 0-205°C
- Vapor check
- Double door seal (Aflas) with Nitrogen purge zone
Controller Assembly
- Four (4) zone PID Chamber Temperature Control, 25-205°C with front panel readout
- PLC Controller with Touchscreen Operator's Interface
- Over-temp Protection Shut-Off
- EMO Buttons, (Front and Rear)
- Ethernet to monitor, upload & download programs
- Positive pressurized electronics chassis with failure interlock and visual confirmation
Measurements:
- Chamber Size: 16" W x 16" D x 18" H
- Overall System Dimensions: 40" W x 38" D x36" H