Pre-Owned

Yield Engineering Systems is now offering pre-owned and factory reconditioned YES tools!

• Call 925-373-8353 or contact us for more details.
• Two (2) tools are currently for sale:
  • YES-3TA (Vacuum Bake System) {Call for Pricing}
  • YES-G500 (Plasma Cleaning System) {Call for Pricing}

YES-3TA (Vacuum Bake System)

• Two (2) PID Temperature Controllers, 25-200ºC with front panel read-out
• Chamber zone controlled for greater temperature uniformity
• State Logic Controller with Touchscreen Display
• Audible and Visual “Cycle Complete” Indicator
• Process Status “Cycle Complete” Indicator Light
• Granville-Phillips Digital Vacuum Gauge
• Side Mounted, High-Capacity, Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
• Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
• Audible and Visual Indication of Incorrect Process
• Overtemp Protection Heater Shut-Off
• Preheated Nitrogen to bring wafers rapidly to Operational Temperature
• Multi-Program Capability
• RS-232 port to upload and download touch screen programs (optional – must purchase software).
• Chamber Material: Electro-Chemically Polished 316L Stainless Steel
• Three Stainless Steel Diffuser Covered Ports to control Turbulence during Nitrogen Cycles

Measurements: 

• Overall system dimensions:  is 63.20 cm W x 50.16 cm D x 77.29 cm H (24.88” x 19.75” x 30.43”) height with light tower: 42.31”
• Interior chamber dimensions: 30.48 cm W x 33.66 cm D x 30.48 cm H (12” x 13.25” x 12”)

 

YES-G500 (Plasma Cleaning System)

• Process Gas inputs: 3 standard                                                                                         
• Number of Recipes: 12 with load/save/loop/link capability                                                                  
• State Logic Controlled System programmable through touch screen interface                            
• Analog MFC control and monitoring (requires MFC options)                                                                                               
• Adjustable electrodes conform to user requirements                                                                                            
• Thermocouple monitoring for protection of temperature sensitive substrates                                           
• Ethernet Communications for Programming                                                               
• TCP/IP Port                                                                                                
• Self-diagnostic program for easy troubleshooting                                                                                                    
• Constant real-time display of System Status                                                                                               
• Audible and Visual Cycle Complete Indicators                                                                                                            
• Audible and Visual Indication of Incorrect Process with diagnostics display                                                   
• Operational Modes: Active, Downstream Electron-free, Active Ion Trap, and Grounded Ion Trap, RIE
• Down Stream Mode produces charge-free plasma with near zero induced voltage                                  
• Field MFC upgradable                                                           
• Chamber Material:  6061-T6 Aluminum

Measurements 

• Interior Chamber Dimensions: 45.72 cm W x 45.72 cm D x 20.955 cm H (18" x 18" x 8.25") 
• Overall System Dimensions: 59.69 cm W x 71.2 cm D x 103.81 cm H (23.5" x 28.03" x 40.87")  Note: light tower adds 27 cm to height (10.62")