Yield Engineering Systems is now offering pre-owned and factory reconditioned YES tools! Call 925-373-8353 or contact us for more details.

YES-1224P (Vapor Phase Deposition System)

  • 316L stainless steel chamber
  • 4 removable internal stainless steel shelves; 16 available configurations
  • Wafer capacity: 100mm - 150mm wafers (8 cassettes), 200mm wafers (2 cassettes), 300mm wafers (1 cassette)
  • 6 CVD and 4 plasma recipes
  • Operation temperature: Ambient up to 205C
  • Uniformity: +/- 5C during dwell after stabilization period
  • Chemical usage: Typical process 0.1 - 3 ml
  • Power requirements: 208V, 30 amps, 60Hz, 1 phase, 4835 Watts (Domestic)
  • Power supply: Automatic Frequency Tuning


  • Overall system dimensions: 40.6 cm W x 46 cm D x 40.6 cm H (46” x 38.75” x 44.38”) light tower increases height 30 cm (11.81")

News & Updates

  • April 26, 2016 - YES Exhibiting at Two Upcoming Tradeshows
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  • January 22, 2016 - YES Receives Multi-Million Dollar Orders for a Dynamic Project in Taiwan
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  • October 7, 2015 - YES CEO Speaking at the AVS 62nd International Symposium & Exhibition
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Other Updates


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About Our Company

Located in Livermore, California, Yield Engineering Systems (YES) is a privately held company that manufactures engineering process control equipment to meet the needs of innovative engineers and lab managers.

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