Tuesday, March 31, 2015
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Pre-Owned

Yield Engineering Systems is now offering pre-owned and factory reconditioned YES tools!

  • Call 925-373-8353 or contact us for more details.    

YES-1224P (Vapor Phase Deposition System)

  • 316L stainless steel chamber
  • 4 removable internal stainless steel shelves; 16 available configurations
  • Wafer capacity:  100mm - 150mm wafers (8 cassettes), 200mm wafers (2 cassettes), 300mm wafers (1 cassette)
  • 6 CVD and 4 plasma recipes
  • Operation temperature:  Ambient up to 205C
  • Uniformity:  +/- 5C during dwell after stabilization period
  • Chemical usage: Typical process 0.1 - 3 ml
  • Power requirements:  208V, 30 amps, 60Hz, 1 phase, 4835 Watts (Domestic)
  • Power supply:  Automatic Frequency Tuning

Measurements: 

  • Overall system dimensions:  40.6 cm W x 46 cm D x 40.6 cm H (46” x 38.75” x 44.38”) light tower increases height 30 cm (11.81")

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