Saturday, August 30, 2014
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Pre-Owned

Yield Engineering Systems is now offering pre-owned and factory reconditioned YES tools!

  • Call 925-373-8353 or contact us for more details.
  • Two (2) tools are currently for sale:
    • YES-3TA (Vacuum Bake System) {Call for Pricing}
    • YES-5TA (Vacuum Bake System) {Call for Pricing}
    • YES-LabKote (Silane Vapor Deposition R&D System) {Call for Pricing}
    • YES-G500 (Plasma Cleaning System) {Call for Pricing}

YES-3TA (Vacuum Bake System)

  • Two (2) PID Temperature Controllers, 25-200ºC with front panel read-out
  • Chamber zone controlled for greater temperature uniformity
  • State Logic Controller with Touchscreen Display
  • Audible and Visual “Cycle Complete” Indicator
  • Process Status “Cycle Complete” Indicator Light
  • Capacitance Diaphragm Vacuum Gauge
  • Side Mounted, High-Capacity, Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
  • Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
  • Audible and Visual Indication of Incorrect Process
  • Overtemp Protection Heater Shut-Off
  • Preheated Nitrogen to bring wafers rapidly to Operational Temperature
  • Multi-Program Capability
  • RS-232 port to upload and download touch screen programs (optional – must purchase software).
  • Chamber Material: Electro-Chemically Polished 316L Stainless Steel
  • Three Stainless Steel Diffuser Covered Ports to control Turbulence during Nitrogen Cycles

Measurements: 

  • Overall system dimensions:  63.20 cm W x 50.16 cm D x 77.29 cm H (24.88” x 19.75” x 30.43”) height with light tower: 42.31”
  • Interior chamber dimensions: 30.48 cm W x 33.66 cm D x 30.48 cm H (12” x 13.25” x 12”)

 

YES-5TA (Vacuum Bake System)

  • Two (2) PID Temperature Controllers, 25-200ºC with front panel read-out
  • Chamber zone controlled for greater temperature uniformity
  • State Logic Controller with Touchscreen Display
  • Audible and Visual “Cycle Complete” Indicator
  • Process Status “Cycle Complete” Indicator Light
  • Capacitance Diaphragm Vacuum Gauge
  • Side Mounted, High-Capacity, Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
  • Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
  • Audible and Visual Indication of Incorrect Process
  • Overtemp Protection Heater Shut-Off
  • Preheated Nitrogen to bring wafers rapidly to Operational Temperature
  • Multi-Program Capability
  • RS-232 port to upload and download touch screen programs (optional – must purchase software).
  • Chamber Material: Electro-Chemically Polished 316L Stainless Steel
  • Three Stainless Steel Diffuser Covered Ports to control Turbulence during Nitrogen Cycles

Measurements

Overall system dimensions:  73.5 cm (W) x 62.56 cm (D) x 88.27 cm (H)  (28.94" x 24.63" x 34.75")
Interior chamber dimensions:  40.64 cm (W) x 45.72 cm (D) x 40.64 cm (H)  (16" x 18" x 16")

YES-LabKote (Silane Vapor Deposition System)

  • Chamber Material 316L Stainless Steel
  • Chemical Usage: 0.1ml – 5ml
  • Chemical Volume Control: 0.1ml increments
  • Vapor Flask Assemblies: 1 (Standard), up to three
  • Safety Audible and visual alarms, redundant over-temp monitoring
  • Number of Recipes: Six recipes with loop and link capability
  • Range of Exposure Time: 1 second – 24 hours
  • Resolution of Timer Setting: 1 second
  • Operation Temperature: Ambient to 205˚C
  • Uniformity: +/- 5°C
  • Vent N2Gas Consumption: 2.6 ft3 [0.07 m3] Max
  • Wafer Throughput: 50 – 150mm Wafers/Hr
  • Slide Throughput: 300 – 75mm Slides/Hr (Requires Slide Trays and Shelf Assembly)
  • Batch Size: 1- 6 inch cassette, maximum (Many combinations may be applied) 

Measurements

  • Overall system dimensions:  96.5 cm (W) X 69.85 cm (D) X 55.9 cm (H)  (38” X 27.5” X 22” )  27.5”H with Light Tower 
  • Chamber dimensions:  21.9 cm (W) X 25.7 cm (D) X 21.9 cm (H)  (8.625” X 10.125” X 8.625”) 

YES-G500 (Plasma Cleaning System)

  • Process Gas inputs: 3 standard                                                                                         
  • Number of Recipes: 12 with load/save/loop/link capability                                                                  
  • State Logic Controlled System programmable through touch screen interface                            
  • Analog MFC control and monitoring (requires MFC options)                                                                                               
  • Adjustable electrodes conform to user requirements                                                                                            
  • Thermocouple monitoring for protection of temperature sensitive substrates                                           
  • Ethernet Communications for Programming                                                               
  • TCP/IP Port                                                                                                
  • Self-diagnostic program for easy troubleshooting                                                                                                    
  • Constant real-time display of System Status                                                                                               
  • Audible and Visual Cycle Complete Indicators                                                                                                            
  • Audible and Visual Indication of Incorrect Process with diagnostics display                                                   
  • Operational Modes: Active, Downstream Electron-free, Active Ion Trap, and Grounded Ion Trap, RIE
  • Down Stream Mode produces charge-free plasma with near zero induced voltage                                  
  • Field MFC upgradable                                                           
  • Chamber Material:  6061-T6 Aluminum
Measurements 
  • Interior Chamber Dimensions: 45.72 cm W x 45.72 cm D x 20.955 cm H (18" x 18" x 8.25") 
  • Overall System Dimensions: 59.69 cm W x 71.2 cm D x 103.81 cm H (23.5" x 28.03" x 40.87")  Note: light tower adds 27 cm to height (10.62")

 

 

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