Silane Coating for MEMS

For MEMS device packaging, a hydrophobic coating reduces stiction, the undesired static friction that wears down devices. Minimizing this stiction goes a long way towards increasing device reliability and longevity as well as preventing damaging lock-up, which occurs when the device flexes and sticks to itself.

The YES-1224 & 1224P chemical vapor deposition systems are ideally suited for surface coating of MEMS devices.