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Image Reversal Oven

YES-8TA & YES-10TA

Overview
YES-8TA Specs
YES-10TA Specs
Stainless Steel Process Cassettes (accessories)

YES-8TA and YES-10TA image reversal systems make it possible to achieve precisely defined vertical sidewall profiles.

Image Reversal

The image reversal process reverses the action of positive resist so negative images can be formed with the same resolution and processing ease of positive resist.

Image reversal advantages:

• Allows variations of the slope of the photoresist sidewall for higher resolution and improved lift off.
• Replaces use of harsh chemicals or plasma "metal etch” processes.
• Using image reversal on two or more layer resist levels can eliminate residual photoresist along the sidewalls, preventing "shorts" from level to level without reducing line width.
• Image reversal done with dark or light fields eliminates standing waves; this allows steep and straight profiles, repeatable results, and excellent chemical deposition uniformity.
• Image reversal achieves excellent results for rework problems; underlying substrate is protected (for a double metal process), so unwanted metal can be stripped away without pitting or eroding the underlying level.

We invite you to Ask a Question or Request a Quote. Or, for a system with dual function capabilities (vapor prime + image reversal), check out our enhanced YES-310TA and YES-58TA models.