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Glossary

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Term Definition
IC Integrated Circuit. A chip etched or imprinted with network or electronic components such as transistors, diodes and resistors along with their interconnections.
ICP Inductively coupled plasma - instrument used to measure metallic elements dissolved in fluids.
ILD Films

Interlayer dielectric films

Image Reversal

The image reversal process reverses the action of positive resist so that negative images can be formed. This allows negative imaging with the resolution and ease of processing that positive resist allows. It also allows variations of the slope of the photo resist side wall for higher resolution and or lift off profiles.

Ingot A mass of semiconducting material or metal heated past its melting point, then cast into a shape which is easy to handle, typically a bar or block. In the semiconductor industry, single crystal ingots (boules) of semiconductor materials can be grown; then they are cut and polished to create wafers.
Inhibitor A chemical substance of combination of substances that, when present, reduces corrosion or chemical attack.
Inorganic Substances composed of matter other than carbon, hydrogen, oxygen and nitrogen.
Integrated Circuit (IC) A chip etched or imprinted with network or electronic components such as transistors, diodes and resistors along with their interconnections.
Invert Emulsion A water-in-oil emulsion in which water droplets (minor phase) are suspended in oil (major phase).

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