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Glossary

If you don't find the term you're looking for, please contact us. We regularly update our glossary. And, if you have any suggestions for processing terms that begin with "J", "K", or "Z", we'd like to hear from you about that, too.


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Term Definition
Hot Wire CVC (HWCVD) Hot wire chemical vapor deposition, also known as Catalytic CVC (Cat-CVD) or Hot Filament CVD (HFCVD).
HPLC - High Performance Liquid Chromatog An instrumental method of analysis used to separate mixtures of compounds based on their chemical or physical properties.
Humidity Cabinet Test A corrosion test involving exposure of metal specimens at controlled levels of humidity and temperature.
Hydrophilic Having an affinity for water.
Hydrophobic Not having an affinity for water. Hydrophobic surfaces will repel water and have a high contact angle. (TeflonŽ is hydrophobic).
Hyper-NA Immersion Scanner

Hyper-NA immersion scanners have a projection lens about 1.0 NA and are required for IC fabrication at the 45nm "half-pitch" node and beyond. Current "dry" 193nm scanners are expected to lose steam at the 65nm half-pitch node.


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