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Glossary

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Term Definition
E-beam Electron-beam refers to a machine that produces a stream of electrons used to expose photoresists directly on a wafer or mask. E-beam lithography is a microprinting technique.
EDXFS Energy Dispersive X-Ray Fluorescence Spectroscopy. An elemental analysis technique which offers rapid, non-destructive qualitative and quantitative multi-element analysis (sodium through uranium) on a wide range of sample types.
Elastomer A material that exhibits rubbery properties. It can recover most of its original dimensions after extension or compression. Used as seal materials in hydraulic systems and various machine tool lubrication systems.
Electomigration (EM)

EM is a reliability problem caused by electrons pushing and moving metal atoms in the direction of current flow at a rate determined by current density. This can lead to line thinning and increased resistivity.

Emulsion A dispersion system consisting of oil (oleophilic) droplets suspended in water made by blending the oil with emulsifying agents and other active materials. Water is the major continuous phase and the oil droplets are the minor (dispersed) phase.
Energy Dispersive X-Ray Fluorescence Spectroscopy An elemental analysis technique that offers rapid, non-destructive qualitative and quantitative multi-element analysis (sodium through uranium) on a wide range of sample types.
Engineered Surface This technology is a physicochemical process that can alter metal surfaces to produce a wear surface with extremely low surface roughness, negative skew profile and Random Micro-Surface Texture.
Etch The removal of selected portions of materials in order to define patterned layers on chips.
Expression Also known as gene expression or protein expression. The process by which a gene's DNA sequence is converted into the structures and functions of a cell. Expression is a multi-step process beginning with transcription of DNA (what genes are made of) into messanger RNA. It is followed by post transcriptional modification and translation into a gene product, followed by folding, post-translational modification and targeting. The amount of protein a cell expresses depends on the tissue, the development stage of the organism and the metabolic or physiologic state of the cell.
Extreme Pressure (EP Additives) A compound, usually containing organic chlorine, sulfur, or phosphorous which reacts with the surface of the metal or tool to form compounds (iron chloride, iron sulfide, or phosphates) which have a lower shear strength than the substrate metal being machined.
Extreme Pressure Lubrication A condition of lubrication in which the friction and wear between two surfaces depends upon the reaction of the lubricant with the surfaces at elevated temperature and pressure.
Extreme Ultraviolet Technology A technology used for extending ultraviolet lithography by manufacturing a lens with concave and convex mirrors. This manufacturing process allows the lens to focus patterns on a chip that are too small to be lithographed.

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