Saturday, November 22, 2014
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Cure/Bake/Anneal

Applications:

Vacuum Bake/Vapor Prime Systems + Image Reversal

BCB Cure



Benzocyclobutene (BCB) is used to create photosensitive polymers, which require fewer processing steps than dry etch materials.

BCB Cure

 

 

Copper Anneal

Annealing is a heat treatment where the microstructure of a material is altered, causing changes in its properties such as strength and hardness.

Copper Anneal

 

 

Vacuum Bake/Vapor Prime Systems + Image Reversal

Low-k Dielectric

Complete dehydration of porous low-K material poses a major challenge to process engineers.

Low-k Dielectric

 

 

Rev Process

Polyimide Cure

Polyimides are high temperature engineering polymers utilized by semiconductor manufacturers for their excellent mechanical, thermal, and electrical properties.

 Polyimide Cure

 

 

Vacuum Bake/Vapor Prime Systems + Image Reversal

Dehydration Bake

Vacuum bake at high temperature to ensure elimination of surface moisture.

Dehydration Bake

 

 

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