Photoresist Treatment

Applications:

Vacuum Bake/Vapor Prime Systems + Image Reversal

Resist Adhesion

YES introduced a process now commonly known in the semiconductor industry as vacuum bake/vapor prime, a key step in the front end processing of silicon chips.

Resist Adhesion


Rev Process

Image Reversal

This process reverses the action of positive resist so negative images can be formed with the same resolution and processing ease that a positive resist allows. What’s more, image reversal allows variations of the slope of the photoresist sidewall for higher resolution and/or lift off profiles.

Image Reversal


Vacuum Bake/Vapor Prime Systems + Image Reversal

Silylation

In the silylation process, HMDS reacts with the oxide surface and forms a strong bond to the surface. At the same time, free bonds are left which readily react with the photoresist, enhancing adhesion.

Silylation


Please call 1-925-373-8353 or 1-888-YES-3637 (US toll free). Or you can submit an inquiry online, contact us.

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News & Updates

  • April 26, 2016 - YES Exhibiting at Two Upcoming Tradeshows
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  • January 22, 2016 - YES Receives Multi-Million Dollar Orders for a Dynamic Project in Taiwan
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  • October 7, 2015 - YES CEO Speaking at the AVS 62nd International Symposium & Exhibition
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About Our Company

Located in Livermore, California, Yield Engineering Systems (YES) is a privately held company that manufactures engineering process control equipment to meet the needs of innovative engineers and lab managers.

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