Yield Engineering Systems (YES) Company History
We got our beginnings serving the semiconductor industry. Our first product, the YES LPIII Vacuum Bake/Vapor Prime Oven (introduced in 1980), innovated front-end processing. To this day, YES vacuum bake/vapor prime ovens are a staple in nanotechnology labs in universities and R&D facilities worldwide.
Through the years, anticipating and meeting the needs of process engineers has driven our business and industry expansion. We understand today's engineers are continually pushed to develop more, better, faster. And, often, our new products are developed by customer request.
Listening to engineers drove our development of the YES 450PB Series high temperature vacuum cure ovens used for polyimide cure, BCB bake, copper anneal, and other processes as well. YES vacuum ovens have a long history of giving engineers complete control of their process, allowing total environmental control for processing their wafers/substrates.
YES also developed a complete line of plasma cleaning systems, from gentle hybrid plasma cleaning systems used prior to wire bonding and surface modification to the more powerful plasma cleaning requirements for photoresist stripping/polyimide removal. In 1998, YES acquired Glen Technologies as well as the Glen 1000P and Glen R3A products and expertise. Since then, we've built upon the expertise of the Glen products as well as the early YES plasma cleaners and etchers (such as the YES R1, YES CV100PZ, and YES CV108).
Our latest tool, the YES-VertaCure, is an automated, high temperature cure series of ovens is designed for today’s most demanding MEMS and semiconductor process applications. Whether it’s for proper curing of multiple layers of polyimide in an RDL (Bond Pad Re-routing) application or annealing copper in an advanced semiconductor device, the YES-VertaCure helps achieve total environmental control to increase yields and extend device performance.
Our goal is to provide our customers with improved processes, not just precise equipment. We have a complete staff of process, design, mechanical, electrical, software and service engineers ready to assist with your process needs. All our work is done in house—we do not outsource. This keeps our resources close at hand when you need us.
We invite you to explore what our 30 years of experience can do for you. We're certain you'll like the YES answer.
Our product line includes:
- Silane Vapor Deposition Systems
- High Temperature Vacuum Cure Ovens
- Hybrid Plasma Cleaners
- Plasma Strippers/Descummers
- Vacuum Bake/Vapor Prime (HMDS) Systems
- Image Reversal (NH3/Ammonia) Tools
- Manual Load Processes
- Batch Process Systems
- Single Wafer Tools
- Fully Automated Systems
Give us a call – together, we can design the future!